Invention Grant
US08119969B2 Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
有权
用于高灵敏度光学扫描及其集成电路的成像装置和方法
- Patent Title: Imaging device and method for high-sensitivity optical scanning and integrated circuit therefor
- Patent Title (中): 用于高灵敏度光学扫描及其集成电路的成像装置和方法
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Application No.: US13013967Application Date: 2011-01-26
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Publication No.: US08119969B2Publication Date: 2012-02-21
- Inventor: Yigal Katzir , Itay Gur-Arie , Yacov Malinovich
- Applicant: Yigal Katzir , Itay Gur-Arie , Yacov Malinovich
- Applicant Address: IL Yavne
- Assignee: Orbotech Ltd
- Current Assignee: Orbotech Ltd
- Current Assignee Address: IL Yavne
- Agency: Sughrue Mion, PLLC
- Main IPC: H01L27/00
- IPC: H01L27/00
Abstract:
An inspection system includes a CMOS integrated circuit having integrally formed thereon an at least two dimensional array of photosensors and providing an inspection output representing an object to be inspected. A defect analyzer is operative to receive the inspection output and to provide a defect report.
Public/Granted literature
- US20110114823A1 IMAGING DEVICE AND METHOD FOR HIGH-SENSITIVITY OPTICAL SCANNING AND INTEGRATED CIRCUIT THEREFOR Public/Granted day:2011-05-19
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