Invention Grant
- Patent Title: Aging device
- Patent Title (中): 老化设备
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Application No.: US11856256Application Date: 2007-09-17
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Publication No.: US08120090B2Publication Date: 2012-02-21
- Inventor: Daisuke Hagishima , Hiroshi Watanabe
- Applicant: Daisuke Hagishima , Hiroshi Watanabe
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2006-265985 20060928
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
An aging device includes a semiconductor substrate, an element isolation insulating layer which is formed in a recessed portion of the semiconductor substrate and which has an upper surface higher than an upper surface of the semiconductor substrate, first and second element regions isolated by the element isolation insulating layer, first and second diffusion layers formed in the semiconductor substrate in the first element region, a first gate insulating film formed on the semiconductor substrate between the first and second diffusion layers, a second gate insulating film formed on the semiconductor substrate in the second element region, and a floating gate electrode formed on the first and second gate insulating films and formed to extend from the first element region to the second element region. The deepest portions of the first and second diffusion layers are isolated from the element isolation insulating layer.
Public/Granted literature
- US20080079057A1 AGING DEVICE Public/Granted day:2008-04-03
Information query
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