Invention Grant
- Patent Title: Tuning fork vibration device and method for manufacturing the same
- Patent Title (中): 调弦叉振动装置及其制造方法
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Application No.: US11692365Application Date: 2007-03-28
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Publication No.: US08120178B2Publication Date: 2012-02-21
- Inventor: Takamitsu Higuchi , Makoto Eguchi
- Applicant: Takamitsu Higuchi , Makoto Eguchi
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2006-090254 20060329
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A tuning fork vibration device includes: a SOI substrate having a substrate, an oxide layer formed above the substrate and a semiconductor layer formed above the oxide layer; a tuning fork type vibration section that is formed by processing the semiconductor layer and the oxide layer and composed of the semiconductor layer; and a driving section for generating flexural vibration of the vibration section, wherein the vibration section includes a support section and two beam sections formed in a cantilever shape with the support section as a base of the beam sections, and the driving section includes a pair of drivers formed on each of the two beam sections, each of the drivers including a first electrode layer, a piezoelectric layer formed above the first electrode layer and a second electrode layer formed above the piezoelectric layer.
Public/Granted literature
- US20070227333A1 TUNING FOLK VIBRATION DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2007-10-04
Information query
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