Invention Grant
- Patent Title: Cold cathode ionization vacuum gauge with trigger plate
- Patent Title (中): 冷阴极电离真空计带触发板
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Application No.: US12470683Application Date: 2009-05-22
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Publication No.: US08120366B2Publication Date: 2012-02-21
- Inventor: Yohsuke Kawasaki
- Applicant: Yohsuke Kawasaki
- Applicant Address: JP Kawasaki-shi
- Assignee: Canon Anelva Corporation
- Current Assignee: Canon Anelva Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-330217 20081225
- Main IPC: G01L21/30
- IPC: G01L21/30

Abstract:
To provide a cold cathode ionization vacuum gauge that does not have a complicated structure and can induce discharge in a short time even after the cold cathode ionization vacuum gauge is used for a long time. A cold cathode ionization vacuum gauge has a rod-like anode 2, a measuring element enclosure (cathode) 1 arranged to surround the anode, and a magnet 3 disposed on the outer periphery of the cathode 1. A discharge trigger supporting electrode 5 having a projection 21 directed toward the center axis of the anode 2 is disposed in a discharge space 9 of the cathode 1. The discharge trigger supporting electrode 5 is removably disposed on the cathode 1, and the distance between the tip of the projection 21 of the discharge trigger supporting electrode 5 and the anode 2 is equal to or more than 0.3 mm.
Public/Granted literature
- US20100164502A1 COLD CATHODE IONIZATION VACUUM GAUGE WITH TRIGGER PLATE Public/Granted day:2010-07-01
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