Invention Grant
- Patent Title: Method for using probe card
- Patent Title (中): 使用探针卡的方法
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Application No.: US11506653Application Date: 2006-08-17
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Publication No.: US08120375B2Publication Date: 2012-02-21
- Inventor: Craig Z. Foster , Ray Wakefield
- Applicant: Craig Z. Foster , Ray Wakefield
- Applicant Address: US CA San Jose
- Assignee: Nextest Systems Corporation
- Current Assignee: Nextest Systems Corporation
- Current Assignee Address: US CA San Jose
- Agency: Dorsey & Whitney LLP
- Main IPC: G01R31/26
- IPC: G01R31/26 ; G01R31/00

Abstract:
An apparatus for use with a wafer prober and a probe card comprising a stiffening member having a feature defining a first plane. The stiffening member is mountable atop the central portion of the probe card. A reference member is provided to mount to the wafer prober and has an underside with a feature defining a second plane. When the feature of the stiffening member defining the first plane is urged against the feature of the reference member defining a second plane the probe tips of the probe card are substantially planarized relative to the wafer prober.
Public/Granted literature
- US20060279302A1 Probe card and method for using probe card, wafer prober utilizing same Public/Granted day:2006-12-14
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