Invention Grant
US08120753B2 Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process
有权
用于产生校准瞳孔核的方法，程序产品和装置及其在光刻仿真过程中的使用方法
- Patent Title: Method, program product and apparatus for generating a calibrated pupil kernel and method of using the same in a lithography simulation process
- Patent Title (中): 用于产生校准瞳孔核的方法，程序产品和装置及其在光刻仿真过程中的使用方法
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Application No.: US11979839Application Date: 2007-11-08
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Publication No.: US08120753B2Publication Date: 2012-02-21
- Inventor: Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
- Applicant: Gabriel Berger , Tamer Coskun , Sangbong Park , Jang Fung Chen
- Applicant Address: NL Veldhoven
- Assignee: ASML Masktools B.V.
- Current Assignee: ASML Masktools B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03B27/32
- IPC: G03B27/32 ; G03B27/54
Abstract:
A method of generating a model for simulating the imaging performance of an optical imaging system having a pupil. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; and defining a model equation representing the imaging performance of the optical imaging system and the process, where the model equation including a calibrated pupil kernel. The calibrated pupil kernel representing a linear model of the pupil performance.
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