Invention Grant
- Patent Title: Condenser microphone chip
- Patent Title (中): 冷凝器麦克风芯片
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Application No.: US11929242Application Date: 2007-10-30
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Publication No.: US08121315B2Publication Date: 2012-02-21
- Inventor: Qinglin Song , Yongchun Tao , Shengli Pang , Tongqing Liu
- Applicant: Qinglin Song , Yongchun Tao , Shengli Pang , Tongqing Liu
- Applicant Address: CH Weifang, Shangdong Province
- Assignee: Goer Tek Inc.
- Current Assignee: Goer Tek Inc.
- Current Assignee Address: CH Weifang, Shangdong Province
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: CN200710064610 20070321; CN200710100243 20070606
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
Disclosed is a condenser microphone chip, comprising: a substrate (21); a diaphragm (26) spaced from the substrate; a curved beam (27) connected with the diaphragm (26) to anchor the diaphragm (26) to the substrate (21); a curved beam connecting part (29) having a shape of a substantially circular plate. The curved beam (27) is arranged in the diaphragm (26). The curved beam (27) includes a plurality of sub beams, each of the plurality of sub beams including a first sub beam portion extending in a substantially radial direction from a circumference of the curved beam connecting part (29); a second sub beam portion extending in a substantially circumferential direction from an end of the first sub beam portion away from the circumference of the curved beam connecting part (29) and having a shape of a substantial arc; and a third sub beam portion extending in the radial direction from an end of the second sub beam portion away from the first sub beam portion and connected to the diaphragm (26). The condenser microphone chip according to the present invention is high in sensitivity, low in noise, wide in frequency band, simple in manufacturing process, and high in reliability. In addition, the condenser microphone chip can be easily manufactured in mass production.
Public/Granted literature
- US20080232615A1 CONDENSER MICROPHONE CHIP Public/Granted day:2008-09-25
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