Invention Grant
US08121799B2 Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire
有权
加热丝丝，加热装置，储存介质和加热丝寿命估算系统的寿命估算方法
- Patent Title: Life estimating method for heater wire, heating apparatus, storage medium, and life estimating system for heater wire
- Patent Title (中): 加热丝丝，加热装置，储存介质和加热丝寿命估算系统的寿命估算方法
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Application No.: US12081404Application Date: 2008-04-15
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Publication No.: US08121799B2Publication Date: 2012-02-21
- Inventor: Nobutoshi Terasawa , Minoru Obata , Noriaki Koyama
- Applicant: Nobutoshi Terasawa , Minoru Obata , Noriaki Koyama
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2007-108639 20070417
- Main IPC: G01B3/44
- IPC: G01B3/44 ; G01B3/52 ; G01N37/00
Abstract:
A method of estimating the life of a heater wire, including the steps of: detecting a maximum value of electric power supplied to the heater wire during a temperature rising period during which a temperature is elevated to a preset heating temperature, obtaining an index indicative of the amplitude of the electric power, and giving a notice that the heater wire is approaching the end of its life when the electric power and the index indicative of the of amplitude of the electric power exceed threshold values respectively provided thereto.
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