Invention Grant
- Patent Title: Optical component for EUVL and smoothing method thereof
- Patent Title (中): EUVL的光学元件及其平滑方法
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Application No.: US12582847Application Date: 2009-10-21
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Publication No.: US08124302B2Publication Date: 2012-02-28
- Inventor: Motoshi Ono , Mitsuru Watanabe , Mika Yokoyama
- Applicant: Motoshi Ono , Mitsuru Watanabe , Mika Yokoyama
- Applicant Address: JP Tokyo
- Assignee: Asahi Glass Company, Limited
- Current Assignee: Asahi Glass Company, Limited
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-234906 20080912
- Main IPC: G03F1/00
- IPC: G03F1/00 ; C03C17/02
Abstract:
The present invention provides a method for smoothing an optical surface of an optical component for EUVL. Specifically, the present invention provides a method for smoothing an optical surface of an optical component for EUVL made of a silica glass material containing TiO2 and comprising SiO2 as a main component with a laser having an oscillation wavelength, to which the optical component for EUVL has an absorption coefficient of 0.01 μm−1 or more, at a fluence of 0.3 to 1.5 J/cm2 in an atmosphere having a water vapor partial pressure of 3.6 mmHg or less.
Public/Granted literature
- US20100068632A1 OPTICAL COMPONENT FOR EUVL AND SMOOTHING METHOD THEREOF Public/Granted day:2010-03-18
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