Invention Grant
- Patent Title: Method for forming pattern, and material for forming coating film
- Patent Title (中): 形成图案的方法和用于形成涂膜的材料
-
Application No.: US12443118Application Date: 2007-09-13
-
Publication No.: US08124312B2Publication Date: 2012-02-28
- Inventor: Kiyoshi Ishikawa , Jun Koshiyama , Kazumasa Wakiya
- Applicant: Kiyoshi Ishikawa , Jun Koshiyama , Kazumasa Wakiya
- Applicant Address: JP Kanagawa
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kanagawa
- Agency: Hoffmann & Baron, LLP
- Priority: JP2006-265115 20060928
- International Application: PCT/JP2007/067886 WO 20070913
- International Announcement: WO2008/038526 WO 20080403
- Main IPC: G03F7/00
- IPC: G03F7/00 ; G03F7/004 ; G03F7/20 ; G03F7/26

Abstract:
A novel method for forming a pattern capable of decreasing the number of steps in a double patterning process, and a material for forming a coating film suitably used in the method for forming a pattern are provided. First resist film (2) is formed by applying a first chemically amplified resist composition on support (1), and thus formed film is selectively exposed, and developed to form multiple first resist patterns (3). Next, on the surface of the first resist patterns (3) are formed multiple coating patterns (5) by forming coating films (4) constituted with a water soluble resin film, respectively. Furthermore, a second chemically amplified resist composition is applied on the support (1) having the coating pattern (5) formed thereon to form second resist film (6), which is selectively exposed and developed to form multiple second resist patterns (7). Accordingly, a pattern including the coating patterns (5) and the second resist patterns (7) is formed on the support (1).
Public/Granted literature
- US20100035177A1 METHOD FOR FORMING PATTERN, AND MATERIAL FOR FORMING COATING FILM Public/Granted day:2010-02-11
Information query