Invention Grant
- Patent Title: Semiconductor device having enhanced photo sensitivity and method for manufacture thereof
- Patent Title (中): 具有增强的光敏度的半导体器件及其制造方法
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Application No.: US11627883Application Date: 2007-01-26
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Publication No.: US08124495B2Publication Date: 2012-02-28
- Inventor: Tzu-Hsuan Hsu , Dun-Nian Yaung , Shou-Gwo Wuu , Ho-Ching Chien , Chien-Hsien Tseng , Jeng-Shyan Lin
- Applicant: Tzu-Hsuan Hsu , Dun-Nian Yaung , Shou-Gwo Wuu , Ho-Ching Chien , Chien-Hsien Tseng , Jeng-Shyan Lin
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L21/76
- IPC: H01L21/76

Abstract:
Provided are a semiconductor device and a method for its manufacture. In one example, the method includes forming an isolation structure having a first refraction index over a sensor embedded in a substrate. A first layer having a second refraction index that is different from the first refraction index is formed over the isolation structure. The first layer is removed from at least a portion of the isolation structure. A second layer having a third refraction index is formed over the isolation structure after the first layer is removed. The third refraction index is substantially similar to the first refraction index.
Public/Granted literature
- US20070120160A1 Semiconductor Device Having Enhanced Photo Sensitivity and Method for Manufacture Thereof Public/Granted day:2007-05-31
Information query
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