Invention Grant
US08124895B2 Planar microelectromechanical device having a stopper structure for out-of-plane movements
有权
具有用于平面外运动的止动结构的平面微机电装置
- Patent Title: Planar microelectromechanical device having a stopper structure for out-of-plane movements
- Patent Title (中): 具有用于平面外运动的止动结构的平面微机电装置
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Application No.: US12359556Application Date: 2009-01-26
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Publication No.: US08124895B2Publication Date: 2012-02-28
- Inventor: Angelo Merassi , Mario Francesco Cortese , Viola Fulvio , Barbara Simoni , Andrea Rusconi Clerici Beltrami
- Applicant: Angelo Merassi , Mario Francesco Cortese , Viola Fulvio , Barbara Simoni , Andrea Rusconi Clerici Beltrami
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group PLLC
- Main IPC: H01H35/14
- IPC: H01H35/14
Abstract:
A microelectromechanical device has a mobile mass that undergoes a movement, in particular a spurious movement, in a first direction in response to an external event; the device moreover has a stopper structure configured so as to stop said spurious movement. In particular, a stopper element is fixedly coupled to the mobile mass and is configured so as to abut against a stopper mass in response to the spurious movement, thereby stopping it. In detail, the stopper element is arranged on the opposite side of the stopper mass with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass and extends in the space occupied by the stopper mass, in the first direction.
Public/Granted literature
- US20090194397A1 PLANAR MICROELECTROMECHANICAL DEVICE HAVING A STOPPER STRUCTURE FOR OUT-OF-PLANE MOVEMENTS Public/Granted day:2009-08-06
Information query
