Invention Grant
- Patent Title: Substrate detection device and substrate conveyance apparatus
- Patent Title (中): 基板检测装置和基板输送装置
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Application No.: US12864785Application Date: 2009-01-14
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Publication No.: US08125651B2Publication Date: 2012-02-28
- Inventor: Shuzo Yagi , Masao Nakane , Yoshinori Isobata
- Applicant: Shuzo Yagi , Masao Nakane , Yoshinori Isobata
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Pearne & Gordon LLP
- Priority: JP2008-016114 20080128
- International Application: PCT/JP2009/000115 WO 20090114
- International Announcement: WO2009/096142 WO 20090806
- Main IPC: G01B11/14
- IPC: G01B11/14

Abstract:
An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout.The substrate detection device includes a projector 41 for projecting inspection light 40 so as to pass through a predetermined position on a path of a substrate 4 conveyed by conveyance belts 26, a light receiver 42 for receiving the inspection light 40 projected by the projector 41, and a detector (a control device 15) for detecting that the substrate 4 reaches the predetermined position based on a decrease in the amount of received light of the inspection light 40 received by the light receiver 42 when the substrate 4 conveyed by the conveyance belts 26 reaches the predetermined position and a portion of the inspection light 40 is blocked by the substrate 4. The inspection light 40 is projected from the projector 41 so as to include opposite ends of a width direction of the conveyance belts 26 in an optical path of the inspection light in a direction orthogonal to a conveyance direction of the substrate 4 conveyed by the conveyance belts 26 and the light receiver 42 receives the inspection light passing through upper and lower regions of the conveyance belts 26 in the width direction.
Public/Granted literature
- US20100309484A1 SUBSTRATE DETECTION DEVICE AND SUBSTRATE CONVEYANCE APPARATUS Public/Granted day:2010-12-09
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