Invention Grant
- Patent Title: Apparatus and method for the determination of the position of a disk-shaped object
- Patent Title (中): 用于确定盘形物体的位置的装置和方法
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Application No.: US12556175Application Date: 2009-09-09
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Publication No.: US08125653B2Publication Date: 2012-02-28
- Inventor: Gert Weniger , Ulrich Pohlmann , Frank Rennicke
- Applicant: Gert Weniger , Ulrich Pohlmann , Frank Rennicke
- Applicant Address: DE Jena
- Assignee: Vistec Semiconductor Systems Jena GmbH
- Current Assignee: Vistec Semiconductor Systems Jena GmbH
- Current Assignee Address: DE Jena
- Agency: Houston Eliseeva, LLP
- Priority: DE102008037419 20081007
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
The invention relates to an apparatus for the determination of the position of a disc-shaped object, particularly of a wafer (10). Thereby, a mount (14) for supporting the sensor device (11) is provided on a movable carrier (22).
Public/Granted literature
- US20100085582A1 APPARATUS AND METHOD FOR THE DETERMINATION OF THE POSITION OF A DISK-SHAPED OBJECT Public/Granted day:2010-04-08
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