Invention Grant
- Patent Title: Optical scanning device
- Patent Title (中): 光学扫描装置
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Application No.: US12443221Application Date: 2007-09-26
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Publication No.: US08125699B2Publication Date: 2012-02-28
- Inventor: Jun Akedo , Jaehyuk Park , Harumichi Sato
- Applicant: Jun Akedo , Jaehyuk Park , Harumichi Sato
- Applicant Address: JP Tokyo
- Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee: National Institute of Advanced Industrial Science and Technology
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2006-261678 20060927
- International Application: PCT/JP2007/068674 WO 20070926
- International Announcement: WO2008/041585 WO 20080410
- Main IPC: G02B26/08
- IPC: G02B26/08

Abstract:
An optical scanning device of the invention includes: a substrate; a torsion bar portion which is connected to the substrate; a mirror portion which is supported by the torsion bar portion; a drive source which causes the substrate to oscillate; and a light source which projects light onto the mirror portion, where the mirror portion resonates and vibrates in accordance with a vibration imparted to the substrate by the drive source, a direction of reflection light from the light projected onto the mirror portion from the light source changes in accordance with the vibration of the mirror portion, the drive source is provided on a portion of the substrate at a distance from a connected portion where the substrate is connected to the torsion bar portion, and a substrate shape control device which controls the shape of the substrate itself is provided on the substrate.
Public/Granted literature
- US20100014142A1 OPTICAL SCANNING DEVICE Public/Granted day:2010-01-21
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