An electrostatic holding apparatus is configured to electrostatically hold objects (W1, W2) to be held by applying a predetermined high voltage to a plurality of electrode groups (112a, 112b) as a holding part. A high-voltage generating part or high voltage generating source (114) to convert from a low voltage to a predetermined high voltage necessary to hold the objects electrostatically is disposed on each of electrode modules (110). The high-voltage generating part (114) is hermetically closed or sealed. The high-voltage generating part may include a voltage amplifying circuit. The high-voltage generating part may include a battery and a voltage amplifying circuit.