Invention Grant
- Patent Title: Subtrate treatment apparatus
- Patent Title (中): 滴剂处理装置
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Application No.: US12176601Application Date: 2008-07-21
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Publication No.: US08127391B2Publication Date: 2012-03-06
- Inventor: Masahiro Nonomura , Junichi Ishii
- Applicant: Masahiro Nonomura , Junichi Ishii
- Applicant Address: JP
- Assignee: Dainippon Screen Mfg. Co., Ltd.
- Current Assignee: Dainippon Screen Mfg. Co., Ltd.
- Current Assignee Address: JP
- Agency: Ostrolenk Faber LLP
- Priority: JP2007-194166 20070726
- Main IPC: B08B11/02
- IPC: B08B11/02

Abstract:
An inventive substrate treatment apparatus includes a substrate rotation unit which rotates a substrate, a brush to be brought into contact with at least a peripheral edge portion of a front surface of the substrate rotated by the substrate rotation unit, and a peripheral rinse liquid ejection unit which ejects a rinse liquid toward a predetermined rinse liquid applying position on the peripheral edge portion of the front surface of the substrate from a position located radially inward of the predetermined rinse liquid applying position with respect to a rotation radius of the substrate, the predetermined rinse liquid applying position being spaced downstream in a substrate rotation direction from a brush contact area of the peripheral edge portion kept in contact with the brush.
Public/Granted literature
- US20090025763A1 SUBTRATE TREATMENT APPARATUS Public/Granted day:2009-01-29
Information query
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