Invention Grant
- Patent Title: Angular velocity sensing element
- Patent Title (中): 角速度感测元件
-
Application No.: US12318329Application Date: 2008-12-24
-
Publication No.: US08127609B2Publication Date: 2012-03-06
- Inventor: Ken Unno , Takao Noguchi , Kenichi Tochi , Kazuya Maekawa
- Applicant: Ken Unno , Takao Noguchi , Kenichi Tochi , Kazuya Maekawa
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-338572 20071228
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
An angular velocity sensing element is provided, which is able to prevent breakage of an oscillation arm even when an excessively large shock is given. An angular velocity sensing element 2 according to the present embodiment includes oscillation arms 22, 23 and 24 formed of a semiconductor material, and a stopper member provided to limit the oscillation range of the oscillation arms. As such a stopper member, a first stopper member 25 is provided, for example, which limits the oscillation range of the oscillation arms at least within a single plane of the arms. Fixing portions 21, the oscillation arms 22, 23 and 24 and the first stopper member 25 are integrally formed by processing a semiconductor material, such as silicon.
Public/Granted literature
- US20090165556A1 Angular velocity sensing element Public/Granted day:2009-07-02
Information query