Invention Grant
- Patent Title: Pressure-insensitive mass flow controller
- Patent Title (中): 压力敏感质量流量控制器
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Application No.: US11678251Application Date: 2007-02-23
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Publication No.: US08127783B2Publication Date: 2012-03-06
- Inventor: Mohammed Nuhu Balarabe , Philip Barros , Raul A. Martin , Mark A. Crockett , Eric S. Sklar
- Applicant: Mohammed Nuhu Balarabe , Philip Barros , Raul A. Martin , Mark A. Crockett , Eric S. Sklar
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Fish & Richardson P.C.
- Main IPC: F16K31/02
- IPC: F16K31/02

Abstract:
A method of preventing a mass flow controller from participating in crosstalk in an array of mass flow controllers is described. The method includes sensing and providing a signal indicative of a fluid pressure inside of a mass flow controller with a pressure sensor contained within the mass flow controller, determining a response of a control valve to a rapid pressure perturbation at the inlet of the mass flow controller using the signal indicative of the fluid pressure to avoid overcompensation for the rapid pressure perturbation, and adjusting a control valve contained within the mass flow controller downstream of the pressure sensor, based on the determined response, so that the mass flow controller avoids overcompensating for the rapid pressure perturbation. The pressure sensor is positioned such that the pressure sensor is sensitive to rapid pressure perturbations at the inlet of the mass flow controller.
Public/Granted literature
- US20070131282A1 PRESSURE-INSENSITIVE MASS FLOW CONTROLLER Public/Granted day:2007-06-14
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