Invention Grant
- Patent Title: Chemical mechanical polishing pad
- Patent Title (中): 化学机械抛光垫
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Application No.: US12360967Application Date: 2009-01-28
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Publication No.: US08128464B2Publication Date: 2012-03-06
- Inventor: Masayuki Motonari , Tomikazu Ueno , Masahiro Yamamoto , Yuugo Tai , Hiroyuki Miyauchi
- Applicant: Masayuki Motonari , Tomikazu Ueno , Masahiro Yamamoto , Yuugo Tai , Hiroyuki Miyauchi
- Applicant Address: JP Tokyo
- Assignee: JSR Corporation
- Current Assignee: JSR Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-035819 20080218
- Main IPC: B24D11/00
- IPC: B24D11/00

Abstract:
A chemical mechanical polishing pad used for chemical mechanical polishing comprises a polishing surface, a non-polishing surface that is provided opposite to the polishing surface, a side surface that connects an outer edge of the polishing surface and an outer edge of the non-polishing surface, and a plurality of grooves formed in the polishing surface. The side surface has a slope surface that is connected to the polishing surface, and a depth of the grooves is equal to or smaller than a height of the slope surface.
Public/Granted literature
- US20090209185A1 CHEMICAL MECHANICAL POLISHING PAD Public/Granted day:2009-08-20
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