Invention Grant
- Patent Title: Apparatus for manufacturing polycrystalline silicon thin film
- Patent Title (中): 多晶硅薄膜制造装置
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Application No.: US12864622Application Date: 2009-01-30
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Publication No.: US08128714B2Publication Date: 2012-03-06
- Inventor: Jae-Sang Ro , Won-Eui Hong
- Applicant: Jae-Sang Ro , Won-Eui Hong
- Applicant Address: KR
- Assignee: Ensiltech Corporation
- Current Assignee: Ensiltech Corporation
- Current Assignee Address: KR
- Agency: Cantor Colburn LLP
- Priority: KR10-2008-0010293 20080131
- International Application: PCT/KR2009/000480 WO 20090130
- International Announcement: WO2009/096747 WO 20090806
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is an apparatus for manufacturing a polysilicon thin film by depositing an amorphous silicon thin film and an upper silicon dioxide substrate on a lower silicon dioxide substrate, forming a conductive thin film on the upper silicon dioxide substrate, and applying an electric field and performing Joule heating to crystallize the amorphous silicon thin film, the apparatus comprising power terminals for elastically contacting both upper ends of the conductive thin film and supplying power to the conductive thin film, and support members for elastically supporting the substrate such that the power terminals closely contact both upper ends of the conductive thin film to form a uniform electric field at the conductive thin film. Therefore, it is possible to apply an electric field to a conductive thin film and perform Joule heating to crystallize an amorphous silicon thin film, and support members are installed at both lower surfaces of a silicon dioxide substrate to elastically support the silicon dioxide substrate such that power terminals closely contact both upper ends of the conductive thin film, thereby forming a uniform electric field at the conductive thin film to efficiently perform crystallization within a short time.
Public/Granted literature
- US20100313397A1 APPARATUS FOR MANUFACTURING POLYCRYSTALLINE SILICON THIN FILM Public/Granted day:2010-12-16
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