Invention Grant
- Patent Title: Vertical substrate transfer apparatus and film-forming apparatus
- Patent Title (中): 垂直基板转印装置和成膜装置
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Application No.: US12226364Application Date: 2007-04-11
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Publication No.: US08128793B2Publication Date: 2012-03-06
- Inventor: Hajime Nakamura , Mayako Taniguchi , Koji Ishino , Takaaki Shindou , Junichirou Tsutsui , Yukio Kikuchi , Kazuya Saitou
- Applicant: Hajime Nakamura , Mayako Taniguchi , Koji Ishino , Takaaki Shindou , Junichirou Tsutsui , Yukio Kikuchi , Kazuya Saitou
- Applicant Address: JP Kanagawa
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Carothers and Carothers
- Priority: JP2006-115238 20060419
- International Application: PCT/JP2007/057968 WO 20070411
- International Announcement: WO2007/123032 WO 20071101
- Main IPC: C23C14/00
- IPC: C23C14/00

Abstract:
To provide a vertical substrate transfer apparatus and a film-forming apparatus capable of, regardless of a carrying position of a substrate, subjecting either surface thereof to film-formation, and capable of supporting and carrying the substrate without interfering with a non-film-forming surface.A film-forming apparatus (1) according to the present invention includes a carrier (15) giving support so that either surface of a substrate (W) is processable, a first position changing section (3) changing a carrying position of the carrier (15), and a carrying chamber (9) housing the carrier, whose position is changed therein and which carries the carrier to a film-forming chamber (10). With the above construction, it becomes possible to subject either surface to film-forming processing regardless of the carrying position of the substrate (W). Further, it becomes possible to change a film-forming surface (Wa) in the course of carrying the substrate (W). Furthermore, it becomes possible to support the substrate (W) without causing the carrier (15) to interfere with a non-film-forming surface of the substrate (W).
Public/Granted literature
- US20090139864A1 Vertical Substrate Transfer Apparatus and Film-Forming Apparatus Public/Granted day:2009-06-04
Information query
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