Invention Grant
- Patent Title: Substrate supporting member
- Patent Title (中): 基板支撑构件
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Application No.: US11867044Application Date: 2007-10-04
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Publication No.: US08129016B2Publication Date: 2012-03-06
- Inventor: Tetsuya Kawajiri , Yasufumi Aihara , Tomoyuki Fujii
- Applicant: Tetsuya Kawajiri , Yasufumi Aihara , Tomoyuki Fujii
- Applicant Address: JP Nagoya
- Assignee: NGK Insulators, Ltd.
- Current Assignee: NGK Insulators, Ltd.
- Current Assignee Address: JP Nagoya
- Agency: Burr & Brown
- Main IPC: B32B3/26
- IPC: B32B3/26 ; B32B15/00

Abstract:
A substrate supporting member includes: a plate-shaped ceramic body having a surface serving as a substrate supporting surface; a plate-shaped composite material body which is joined to a surface of the ceramic body opposite to the substrate supporting surface with a joint material interposed therebetween and the plate-shaped composite material body made of porous ceramic with pores filled with metal, the composite material body having a porosity of more than 0% and not more than 5%; and a metallic plate which is joined to a surface of the composite material body opposite to the surface joined to the ceramic body with a joint material interposed therebetween.
Public/Granted literature
- US20080138645A1 SUBSTRATE SUPPORTING MEMBER Public/Granted day:2008-06-12
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