Invention Grant
- Patent Title: Use of blended solvents in defectivity prevention
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Application No.: US12652870Application Date: 2010-01-06
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Publication No.: US08129089B2Publication Date: 2012-03-06
- Inventor: Mark H. Somervell , Benjamen M. Rathsack , David C. Hall
- Applicant: Mark H. Somervell , Benjamen M. Rathsack , David C. Hall
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Jacqueline J. Garner; Wade J. Brady III; Frederick J. Telecky Jr.
- Main IPC: G03F7/004
- IPC: G03F7/004 ; H01L21/31
Abstract:
The present invention provides a blended solvent for solubilizing an ultraviolet photoresist. The blended solvent comprises a mixture of from about 5 vol % to about 95 vol % of a first solvent, wherein the first solvent comprises a cyclic ester. A balance of the mixture comprises a second solvent, wherein the second solvent comprises a volatile organic liquid.
Public/Granted literature
- US20100104975A1 Use of Blended Solvents in Defectivity Prevention Public/Granted day:2010-04-29
Information query
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