Invention Grant
US08129200B2 Nonvolatile ferroelectric memory device and method for manufacturing the same 有权
非易失性铁电存储器件及其制造方法

Nonvolatile ferroelectric memory device and method for manufacturing the same
Abstract:
A nonvolatile ferroelectric memory device includes a plurality of unit cells. Each of the unit cells includes a cell capacitor and a cell transistor. The cell capacitor includes a storage node, a ferroelectric layer, and a plate line. The cell capacitors of more than one of the plurality of unit cells are provided in a trench.
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