Invention Grant
US08129212B2 Surface cleaning and texturing process for crystalline solar cells
失效
晶体太阳能电池的表面清洁和纹理化工艺
- Patent Title: Surface cleaning and texturing process for crystalline solar cells
- Patent Title (中): 晶体太阳能电池的表面清洁和纹理化工艺
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Application No.: US12383350Application Date: 2009-03-23
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Publication No.: US08129212B2Publication Date: 2012-03-06
- Inventor: Kapila Wijekoon , Rohit Mishra , Michael P Stewart , Timothy Weidman , Hari Ponnekanti , Tristan R. Holtam
- Applicant: Kapila Wijekoon , Rohit Mishra , Michael P Stewart , Timothy Weidman , Hari Ponnekanti , Tristan R. Holtam
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Methods for surface texturing a crystalline silicon substrate are provided. In one embodiment, the method includes providing a crystalline silicon substrate, wetting the substrate with an alkaline solution comprising a wetting agent, and forming a textured surface with a structure having a depth about 1 μm to about 10 μm on the substrate. In another embodiment, a method of performing a substrate texture process includes providing crystalline silicon substrate, pre-cleaning the substrate in a HF aqueous solution, wetting the substrate with a KOH aqueous solution comprising polyethylene glycol (PEG) compound, and forming a textured surface with a structure having a depth about 3 μm to about 8 μm on the substrate.
Public/Granted literature
- US20090280597A1 Surface cleaning and texturing process for crystalline solar cells Public/Granted day:2009-11-12
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