Invention Grant
US08129217B2 Method for producing at least one multilayer body, and multilayer body
有权
用于生产至少一个多层体的方法和多层体
- Patent Title: Method for producing at least one multilayer body, and multilayer body
- Patent Title (中): 用于生产至少一个多层体的方法和多层体
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Application No.: US12309908Application Date: 2007-08-03
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Publication No.: US08129217B2Publication Date: 2012-03-06
- Inventor: Gernot Schneider , Rene Staub , Wayne Robert Tompkin , Achim Hansen
- Applicant: Gernot Schneider , Rene Staub , Wayne Robert Tompkin , Achim Hansen
- Applicant Address: CH Zug
- Assignee: OVD Kinegram AG
- Current Assignee: OVD Kinegram AG
- Current Assignee Address: CH Zug
- Agency: Hoffman & Baron, LLP
- Priority: DE102006037433 20060809
- International Application: PCT/EP2007/006884 WO 20070803
- International Announcement: WO2008/017426 WO 20080214
- Main IPC: H01L51/40
- IPC: H01L51/40 ; H01L21/302 ; H01L21/461

Abstract:
The invention concerns a process for the production of a multi-layer body, wherein the multi-layer body includes at least two functional layers on a top side of a carrier substrate, which are structured in register relationship with each other, by a procedure whereby an underside of the carrier substrate is prepared in such a way that in a first region there results a transparency for a first exposure radiation and in at least one second region there results a transparency for at least one second exposure radiation different therefrom in register relationship with the first region, the underside is successively exposed with the first and the at least one second exposure radiation and the first exposure radiation is used for structuring a first functional layer and the at least one second exposure radiation is used for structuring at least one second functional layer on the top side of the carrier substrate.
Public/Granted literature
- US20090289246A1 METHOD FOR PRODUCING AT LEAST ONE MULTILAYER BODY, AND MULTILAYER BODY Public/Granted day:2009-11-26
Information query
IPC分类: