Invention Grant
- Patent Title: Method for fabricating thin film transistor
- Patent Title (中): 制造薄膜晶体管的方法
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Application No.: US12656316Application Date: 2010-01-25
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Publication No.: US08129233B2Publication Date: 2012-03-06
- Inventor: Woong Gi Jun , Gee Sung Chae , Jae Seok Heo
- Applicant: Woong Gi Jun , Gee Sung Chae , Jae Seok Heo
- Applicant Address: KR Seoul
- Assignee: LG Display Co., Ltd.
- Current Assignee: LG Display Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: McKenna Long & Aldridge LLP
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for fabricating a thin film transistor (TFT) on a substrate includes forming a gate electrode; forming a semiconductor layer being insulated from the gate electrode and partially overlapped with the gate electrode; sequentially forming first and second gate insulating layers between the gate electrode and the semiconductor layer, wherein the first gate insulating layer is formed of a material different from the second gate insulating layer and at least one of the first and second gate insulating layers includes a sol-compound; and forming source and drain electrodes at both sides of the semiconductor layer.
Public/Granted literature
- US20100136755A1 Method for fabricating thin film transistor Public/Granted day:2010-06-03
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