Invention Grant
US08129267B2 Alpha particle blocking wire structure and method fabricating same
有权
Alpha粒子阻挡线结构及其制造方法
- Patent Title: Alpha particle blocking wire structure and method fabricating same
- Patent Title (中): Alpha粒子阻挡线结构及其制造方法
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Application No.: US12052881Application Date: 2008-03-21
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Publication No.: US08129267B2Publication Date: 2012-03-06
- Inventor: Cyril Cabral, Jr. , K. Paul Muller , Kenneth P. Rodbell
- Applicant: Cyril Cabral, Jr. , K. Paul Muller , Kenneth P. Rodbell
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Schmeiser, Olsen & Watts
- Agent Louis J. Parcello
- Main IPC: H01L21/4763
- IPC: H01L21/4763

Abstract:
An alpha particle blocking structure and method of making the structure. The structure includes: a semiconductor substrate; a set of interlevel dielectric layers stacked from a lowermost interlevel dielectric layer closest to the substrate to a uppermost interlevel dielectric layer furthest from the substrate, each interlevel dielectric layer of the set of interlevel dielectric layers including electrically conductive wires, top surfaces of the wires substantially coplanar with top surfaces of corresponding interlevel dielectric layers; an electrically conductive tot final pad contacting a wire pad of the uppermost interlevel dielectric layer; an electrically conductive plating base layer contacting a top surface of the terminal pad; and a copper block on the plating base layer.
Public/Granted literature
- US20120028458A1 ALPHA PARTICLE BLOCKING WIRE STRUCTURE AND METHOD FABRICATING SAME Public/Granted day:2012-02-02
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