Invention Grant
- Patent Title: Method for making an aperture in a carrier and electrically connecting two opposite faces of the carrier
- Patent Title (中): 用于在载体中制造孔并电连接载体的两个相对面的方法
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Application No.: US12908090Application Date: 2010-10-20
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Publication No.: US08129274B2Publication Date: 2012-03-06
- Inventor: Tse Min Chu
- Applicant: Tse Min Chu
- Applicant Address: TW Taoyuan Coiunty
- Assignee: Aflash Technology Co., Ltd.
- Current Assignee: Aflash Technology Co., Ltd.
- Current Assignee Address: TW Taoyuan Coiunty
- Agency: Muncy, Geissler, Olds & Lowe, PLLC
- Priority: TW98222620U 20091203
- Main IPC: H01L21/44
- IPC: H01L21/44
Abstract:
Disclosed is a method for making an aperture in a carrier and electrically connecting two opposite faces of the carrier. At first, a carrier is provided. Secondly, a heater is provided for heating a portion of the carrier in an environment rich in oxygen, thus making an aperture in the carrier and forming an isolative layer on the wall of the aperture synchronously. Finally, the aperture is filled with a conductive material.
Public/Granted literature
- US20110143536A1 Method for Making an Aperture in a Carrier and Electrically Connecting Two Opposite Faces of the Carrier Public/Granted day:2011-06-16
Information query
IPC分类:
