The present invention relates to a perfluoropolyether-modified polysiloxane represented by general formula (1): wherein Rf is a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms; X is a fluorine atom or a trifluoromethyl group; Q is a divalent organic group having 1 to 12 carbon atoms; R1, R2, and R3 are, independently of each other, an alkyl group having 1 to 10 carbon atoms or an aryl group; a, b, c, and d are, independently of each other, an integer of from 0 to 200, provided that a total of a, b, c and d is 1 or larger; e is an integer of 0 or 1; and z is an integer of from 5 to 100; a method for preparing the same; and a defoaming agent comprising the same.