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US08129622B2 Insulator for feedthrough 有权
绝缘子馈通

Insulator for feedthrough
Abstract:
A hermetically sealed microelectromechanical system (MEMS) package for an implantable medical device is presented. The MEMS comprises a first substrate that includes an aperture. A feedthrough assembly is coupled to the aperture; the feedthrough assembly comprises a conductive element housed in a glass insulating member. A second substrate is coupled to the first substrate.
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