Invention Grant
US08129708B2 Highly integrated phase change memory device having micro-sized diodes and method for manufacturing the same 有权
具有微尺寸二极管的高度集成的相变存储器件及其制造方法

Highly integrated phase change memory device having micro-sized diodes and method for manufacturing the same
Abstract:
A highly integrated phase change memory device and a method for manufacturing the same is disclosed. The highly integrated phase change memory device includes a semiconductor substrate having a cell area and a peripheral area with impurity regions formed in the cell area and extending in parallel to each other in a first direction to form a striped pattern. A gate electrode is formed in the peripheral area and dummy gate electrodes are formed in the cell area and extending in a second direction perpendicular to the first direction of the impurity regions. An interlayer dielectric layer pattern exposes portions of the cell area and the peripheral area and a PN diode is formed in a space defined by a pair of dummy gate electrodes and a pair of interlayer dielectric layer patterns.
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