Invention Grant
US08129718B2 Amorphous oxide semiconductor and thin film transistor using the same
有权
非晶氧化物半导体和使用其的薄膜晶体管
- Patent Title: Amorphous oxide semiconductor and thin film transistor using the same
- Patent Title (中): 非晶氧化物半导体和使用其的薄膜晶体管
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Application No.: US12534436Application Date: 2009-08-03
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Publication No.: US08129718B2Publication Date: 2012-03-06
- Inventor: Ryo Hayashi , Hideyuki Omura , Hideya Kumomi , Yuzo Shigesato
- Applicant: Ryo Hayashi , Hideyuki Omura , Hideya Kumomi , Yuzo Shigesato
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2008-219888 20080828
- Main IPC: H01L29/10
- IPC: H01L29/10

Abstract:
There is provided an amorphous oxide semiconductor including hydrogen and at least one element of indium (In) and zinc (Zn), the amorphous oxide semiconductor containing one of hydrogen atoms and deuterium atoms of 1×1020 cm−3 or more to 1×1022 cm−3 or less, and a density of bonds between oxygen and hydrogen except bonds between excess oxygen (OEX) and hydrogen in the amorphous oxide semiconductor being 1×1018 cm−3 or less.
Public/Granted literature
- US20100051938A1 AMORPHOUS OXIDE SEMICONDUCTOR AND THIN FILM TRANSISTOR USING THE SAME Public/Granted day:2010-03-04
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