Invention Grant
US08129764B2 Imager devices having differing gate stack sidewall spacers, method for forming such imager devices, and systems including such imager devices
有权
具有不同栅极堆叠侧壁间隔物的成像器件,用于形成这种成像器件的方法以及包括这种成像器件的系统
- Patent Title: Imager devices having differing gate stack sidewall spacers, method for forming such imager devices, and systems including such imager devices
- Patent Title (中): 具有不同栅极堆叠侧壁间隔物的成像器件,用于形成这种成像器件的方法以及包括这种成像器件的系统
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Application No.: US12137041Application Date: 2008-06-11
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Publication No.: US08129764B2Publication Date: 2012-03-06
- Inventor: Salman Akram
- Applicant: Salman Akram
- Applicant Address: KY George Town
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY George Town
- Main IPC: H01L31/062
- IPC: H01L31/062

Abstract:
Imager devices have a sensor array and a peripheral region at least partially surrounding the sensor array. At least one transistor in the peripheral region has a gate stack sidewall spacer that differs in composition from a gate stack sidewall spacer on at least one transistor in the sensor array. Imaging systems include such an imager device configured to communicate electrically with at least one electronic signal processor and at least one memory storage device. Methods of forming such imager devices include providing layers of oxide and nitride materials over transistors on a workpiece, and using etching processes to form gate stack sidewall spacers on the transistors.
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