Invention Grant
- Patent Title: High-voltage transistor and method for its manufacture
- Patent Title (中): 高压晶体管及其制造方法
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Application No.: US11992172Application Date: 2005-09-20
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Publication No.: US08129782B2Publication Date: 2012-03-06
- Inventor: Martin Knaipp
- Applicant: Martin Knaipp
- Applicant Address: AT Unterpremstätten
- Assignee: austriamicrosystems AG
- Current Assignee: austriamicrosystems AG
- Current Assignee Address: AT Unterpremstätten
- Agency: Cozen O'Connor
- International Application: PCT/EP2005/010138 WO 20050920
- International Announcement: WO2007/033692 WO 20070329
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L21/336

Abstract:
A high-voltage transistor is provided with a well of a first conductivity type, which is arranged in a substrate (10) of a second conductivity type, with a source (14), a drain (12), and a gate electrode (18) above a channel region (KN, KP) formed between the source and the drain, wherein several staggered and nested wells (11, 13, 15, 17) of the same conductivity type extend from the source (14) or the drain (12) into the substrate (10) and wherein the doping concentration (log c) of the wells essentially decreases and is smoothed from the substrate surface with increasing depth (T) and also laterally. In this way, field-strength increases and also unintentional breakdown are prevented. Furthermore, a production method is specified.
Public/Granted literature
- US20090212360A1 High-Voltage Transistor and Method for its Manufacture Public/Granted day:2009-08-27
Information query
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