Invention Grant
- Patent Title: Package substrate having semiconductor component embedded therein and fabrication method thereof
- Patent Title (中): 包含半导体元件的封装衬底及其制造方法
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Application No.: US12554389Application Date: 2009-09-04
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Publication No.: US08129835B2Publication Date: 2012-03-06
- Inventor: Kan-Jung Chia
- Applicant: Kan-Jung Chia
- Applicant Address: TW Taoyuan
- Assignee: Unimicron Technology Corp.
- Current Assignee: Unimicron Technology Corp.
- Current Assignee Address: TW Taoyuan
- Agency: Edwards Wildman Palmer LLP
- Agent Peter F. Corless; Steven M. Jensen
- Main IPC: H01L23/52
- IPC: H01L23/52

Abstract:
A package substrate having a semiconductor component embedded therein and a method of fabricating the same are provided, including: providing a semiconductor chip with electrode pads disposed on an active surface thereof; forming a passivation layer on the active surface and the electrode pads; forming on the passivation layer metal pads corresponding in position to the electrode pads, respectively, so as for the semiconductor chip to be fixed in position to an opening of a substrate body; forming a first dielectric layer on the semiconductor chip and the substrate body; forming dielectric layer openings by laser and preventing the electrode pads from being penetrated by the metal pads; removing the metal pads and the passivation layer in the dielectric layer openings so as to expose the electrode pads therefrom; and forming a first wiring layer on the first dielectric layer for electrical connection with the electrode pads.
Public/Granted literature
- US20110057305A1 PACKAGE SUBSTRATE HAVING SEMICONDUCTOR COMPONENT EMBEDDED THEREIN AND FABRICATION METHOD THEREOF Public/Granted day:2011-03-10
Information query
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