Invention Grant
US08130475B2 Method for manufacturing CPP-type thin film magnetic head provided with a pair of magnetically free layers 有权
制造具有一对无磁性层的CPP型薄膜磁头的方法

Method for manufacturing CPP-type thin film magnetic head provided with a pair of magnetically free layers
Abstract:
The present invention relates to a method of manufacturing a DFL type thin film magnetic head. The method includes laminating each of the layers from the lower magnetization control layer to the upper exchange coupling layer above the substrate; laminating an auxiliary magnetization control layer including at least a CoZrTa layer above the upper exchange coupling layer; forming at least each of the layers from the lower exchange coupling layer to the auxiliary magnetization control layer in pillar shape, and disposing the bias magnetic field application layer at an opposite position with respect to the ABS of each of the pillar shaped layers; trimming the auxiliary magnetization control layer by removing a part of the auxiliary magnetization control layer that is formed in the pillar shape, and disposing the upper shield layer such that the trimmed auxiliary magnetization control layer is at least covered.
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