Invention Grant
- Patent Title: Pressure wave generator and temperature controlling method thereof
- Patent Title (中): 压力波发生器及其温度控制方法
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Application No.: US12521120Application Date: 2007-12-17
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Publication No.: US08130593B2Publication Date: 2012-03-06
- Inventor: Masato Hayashi , Masami Yakabe , Nobuyoshi Koshida
- Applicant: Masato Hayashi , Masami Yakabe , Nobuyoshi Koshida
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: Tokyo Electron Limited,National University Corporation, Tokyo University of Agriculture and Technology
- Current Assignee: Tokyo Electron Limited,National University Corporation, Tokyo University of Agriculture and Technology
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Ditthavong Mori & Steiner, P.C.
- Priority: JP2006-355625 20061228
- International Application: PCT/JP2007/074248 WO 20071217
- International Announcement: WO2008/081706 WO 20080710
- Main IPC: B06B1/06
- IPC: B06B1/06 ; G10K15/04
Abstract:
A pressure wave generator (1) includes a thermally conductive substrate (2), a heat insulating layer (3) formed on one main surface of the substrate (2), an insulator layer (5) formed on the heat insulating layer (3), and a heat generator (4) formed on the insulator layer (5) to generate heat when a current containing an alternating component is applied thereto. The heat insulating layer (3) is formed containing at least one of silicon nitride (Si3N4), silicon dioxide (SiO2), aluminum oxide (Al2O3), magnesium oxide (MgO), diamond crystalline carbon (C), aluminum nitride (AlN), and silicon carbide (SiC). The heat generator (4) is formed containing, for example, gold (Au) or tungsten (W).
Public/Granted literature
- US20100025145A1 PRESSURE WAVE GENERATOR AND TEMPERATURE CONTROLLING METHOD THEREOF Public/Granted day:2010-02-04
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