Invention Grant
- Patent Title: Trapped fluid microsystems for acoustic sensing
- Patent Title (中): 用于声学传感的被捕获的流体微系统
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Application No.: US11656849Application Date: 2007-01-23
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Publication No.: US08130986B2Publication Date: 2012-03-06
- Inventor: Robert David White , Karl Grosh
- Applicant: Robert David White , Karl Grosh
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Brooks Kushman P.C.
- Main IPC: H04R25/00
- IPC: H04R25/00

Abstract:
Silicon and glass micromachined (MEMS) acoustic sensors incorporating trapped-liquid architectures are disclosed. The trapped liquid serves as an acoustic transmission medium allowing the input port to the system to be physically separated from the sensing location. The trapped liquid interacts with a conductive, flexible sensing membrane. Sound pressure waves enter the trapped liquid through an input membrane, travel to the sensing membrane, and excite vibrations of the sensing membrane. The vibrations of the sensing membrane are measured using on-chip capacitive sensing. The capacitive sensing structure is formed by the conductive sensing membrane and a fixed conducting top electrode. As the gap between the conductive sensing membrane and the fixed top electrode varies, the capacitance varies, leading to an electrical signal which is the electrical output of the system.
Public/Granted literature
- US20070230721A1 Trapped fluid microsystems for acoustic sensing Public/Granted day:2007-10-04
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