Invention Grant
US08131059B2 Defect inspection device and defect inspection method for inspecting whether a product has defects
有权
缺陷检查装置和缺陷检查方法,用于检查产品是否有缺陷
- Patent Title: Defect inspection device and defect inspection method for inspecting whether a product has defects
- Patent Title (中): 缺陷检查装置和缺陷检查方法,用于检查产品是否有缺陷
-
Application No.: US12068005Application Date: 2008-01-31
-
Publication No.: US08131059B2Publication Date: 2012-03-06
- Inventor: Junichi Taguchi , Takumichi Sutani
- Applicant: Junichi Taguchi , Takumichi Sutani
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: McDermott Will & Emery LLP
- Priority: JP2007-061817 20070312
- Main IPC: G06K9/62
- IPC: G06K9/62

Abstract:
In an apparatus for photographing an image of a product to judge whether or not a defect is present, a manufacturing desirable image is formed from data acquired when the product was designed, which could be obtained if no defect was present when the product was photographed, an inspection portion where a defect may occur is selected from the formed manufacturing desirable image, a defect pattern is superimposed on the selected inspection portion so as to form a template equipped with the defect pattern. The image of the product is photographed, a template matching operation is carried out as a template having the defect pattern, and judgement is made whether or not a defect is present based upon a matched evaluation value. As a result, the judgement for judging whether or not the defect is present can be directly carried out based upon the evaluation value.
Public/Granted literature
- US20080310702A1 Defect inspection device and defect inspection method Public/Granted day:2008-12-18
Information query