Invention Grant
- Patent Title: Adaptive on-tool mass flow controller tuning
- Patent Title (中): 自适应工具质量流量控制器调节
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Application No.: US12797753Application Date: 2010-06-10
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Publication No.: US08131400B2Publication Date: 2012-03-06
- Inventor: Alexei V. Smirnov
- Applicant: Alexei V. Smirnov
- Applicant Address: JP Tokyo
- Assignee: Hitachi Metals, Ltd.
- Current Assignee: Hitachi Metals, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Neugeboren O'Dowd PC
- Agent Sean R. O'Dowd
- Main IPC: G05D7/00
- IPC: G05D7/00 ; G05B13/02

Abstract:
One embodiment comprises a method of providing accurate mass flow controller flow rate data for a non-manufacturing-tuning-gas. The mass flow controller may be operated at a setpoint greater than 50%. Data may be recorded to a mass flow controller memory. The setpoint may then be changed to 0%. The recorded data may then be analyzed and one or more non-manufacturing-tuning-gas correction algorithm parameters may be calculated. The one or more non-manufacturing-tuning-gas correction algorithm parameters may be stored in a mass flow controller memory and subsequently used in at least one future mass flow controller operation involving the non-manufacturing-tuning-gas.
Public/Granted literature
- US20110307104A1 Adaptive On-Tool Mass Flow Controller Tuning Public/Granted day:2011-12-15
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