Invention Grant
US08131400B2 Adaptive on-tool mass flow controller tuning 有权
自适应工具质量流量控制器调节

Adaptive on-tool mass flow controller tuning
Abstract:
One embodiment comprises a method of providing accurate mass flow controller flow rate data for a non-manufacturing-tuning-gas. The mass flow controller may be operated at a setpoint greater than 50%. Data may be recorded to a mass flow controller memory. The setpoint may then be changed to 0%. The recorded data may then be analyzed and one or more non-manufacturing-tuning-gas correction algorithm parameters may be calculated. The one or more non-manufacturing-tuning-gas correction algorithm parameters may be stored in a mass flow controller memory and subsequently used in at least one future mass flow controller operation involving the non-manufacturing-tuning-gas.
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