Invention Grant
- Patent Title: Method of evaluating a film
- Patent Title (中): 电影评估方法
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Application No.: US11964206Application Date: 2007-12-26
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Publication No.: US08131492B2Publication Date: 2012-03-06
- Inventor: Shien Cho , Markus Wilde , Katsuyuki Fukutani
- Applicant: Shien Cho , Markus Wilde , Katsuyuki Fukutani
- Applicant Address: JP Kanagawa JP Tokyo
- Assignee: Renesas Electronics Corporation,The Foundation for the Promotion of Industrial Science
- Current Assignee: Renesas Electronics Corporation,The Foundation for the Promotion of Industrial Science
- Current Assignee Address: JP Kanagawa JP Tokyo
- Agency: Young & Thompson
- Priority: JP2006-348095 20061225
- Main IPC: G01N37/00
- IPC: G01N37/00 ; G01D3/00
Abstract:
A method of directly measuring hydrogen permeability of a film is provided. The method of evaluating a film includes acquiring, with respect to a specimen including a plurality of films stacked on each other, ion dose-dependence data of intensity of γ-beam generated by hydrogen resonant nuclear reaction, and fitting the data with a functional equation of the ion dose.
Public/Granted literature
- US20080183420A1 METHOD OF EVALUATING A FILM Public/Granted day:2008-07-31
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