Invention Grant
US08132128B2 Method and system for performing lithography verification for a double-patterning process
有权
用于进行双重图案化处理的光刻验证的方法和系统
- Patent Title: Method and system for performing lithography verification for a double-patterning process
- Patent Title (中): 用于进行双重图案化处理的光刻验证的方法和系统
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Application No.: US12263278Application Date: 2008-10-31
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Publication No.: US08132128B2Publication Date: 2012-03-06
- Inventor: Hua Song , Lantian Wang , Gerard Terrence Luk-Pat , James P. Shiely
- Applicant: Hua Song , Lantian Wang , Gerard Terrence Luk-Pat , James P. Shiely
- Applicant Address: US CA Mountain View
- Assignee: Synopsys, Inc.
- Current Assignee: Synopsys, Inc.
- Current Assignee Address: US CA Mountain View
- Agency: Park, Vaughan, Fleming & Dowler LLP
- Main IPC: G06F17/50
- IPC: G06F17/50 ; G06F19/00

Abstract:
One embodiment of the present invention provides a system that performs lithography verification for a double-patterning process on a mask layout without performing a full contour simulation of the mask layout. During operation, the system starts by receiving a first mask which is used in a first lithography step of the double-patterning process, and a second mask which is used in a second lithography step of the double-patterning process. Note that the first mask and the second mask are obtained by partitioning the mask layout. Next, the system receives an evaluation point on the mask layout. The system then determines whether the evaluation point is exclusively located on a polygon of the first mask, exclusively located on a polygon of the second mask, or located elsewhere. The system next computes a printing indicator at the evaluation point for the mask layout based on whether the evaluation point is exclusively located on a polygon of the first mask or exclusively located on a polygon of the second mask.
Public/Granted literature
- US20100115489A1 METHOD AND SYSTEM FOR PERFORMING LITHOGRAPHY VERIFICATION FOR A DOUBLE-PATTERNING PROCESS Public/Granted day:2010-05-06
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