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US08132304B2 Method of manufacturing a piezoelectric actuator 失效
制造压电致动器的方法

Method of manufacturing a piezoelectric actuator
Abstract:
A method for producing a piezoelectric actuator has the following steps: providing a plurality of piezoelectric material layers (2) which can be assembled into a stack; applying electrode layers (3) each having a recess (4, 4′) to the plurality of piezoelectric material layers, such that an alternating sequence of piezoelectric material layers and electrode layers is formed in the stack, wherein electrode layers with a recess (4) in a first recess zone and electrode layers with a recess (4′) in a second recess zone which differs from the first recess zone are alternatingly formed in the stack; and providing a stress-relieving material (5) in the first and second recesses, the stress-relieving material exhibiting electrically insulating properties after the stack is sintered, and preventing the individual material layers from adhering to one another.
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