Invention Grant
- Patent Title: Chemical liquid supplying apparatus and pump assembly
- Patent Title (中): 化学液体供应装置和泵组件
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Application No.: US12274437Application Date: 2008-11-20
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Publication No.: US08133042B2Publication Date: 2012-03-13
- Inventor: Takeo Yajima
- Applicant: Takeo Yajima
- Applicant Address: JP Tokyo
- Assignee: Koganei Corporation
- Current Assignee: Koganei Corporation
- Current Assignee Address: JP Tokyo
- Agency: McCormick, Paulding & Huber LLP
- Priority: JP2007-312164 20071203
- Main IPC: F04B43/00
- IPC: F04B43/00 ; F04B45/02

Abstract:
A chemical liquid supplying apparatus, which can discharge chemical liquid with high precision, is provided. A pump assembly is detachably mounted in a pump case in which liquid inflow and discharge ports are formed. The pump assembly includes: a cylindrical body in which a piston is slidably incorporated axially; an elastically deformable bellows forming a pump chamber in the pump case and forming a drive chamber in which an indirect medium is enclosed; and an axially elastically-deformable bellows cover continuing with a sliding surface of the piston and forming a seal chamber in which the indirect medium is enclosed, and the pump assembly is unitized. The pump assembly is coupled to a drive shaft via a connecting member, and by axial-directional reciprocating movement of this drive shaft, the piston causes the bellows to perform a pump operation, whereby the chemical liquid is discharged from a liquid discharge portion.
Public/Granted literature
- US20090142205A1 CHEMICAL LIQUID SUPPLYING APPARATUS AND PUMP ASSEMBLY Public/Granted day:2009-06-04
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