Invention Grant
- Patent Title: Encapsulated sputtering target
- Patent Title (中): 封装溅射靶
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Application No.: US12263013Application Date: 2008-10-31
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Publication No.: US08133368B2Publication Date: 2012-03-13
- Inventor: Lara Hawrylchak , Xianmin Tang , Vijay Parhke , Rongjun Wang
- Applicant: Lara Hawrylchak , Xianmin Tang , Vijay Parhke , Rongjun Wang
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson & Sheridan, L.L.P.
- Main IPC: C23C14/00
- IPC: C23C14/00 ; C23C14/06 ; C23C14/08 ; C23C14/14

Abstract:
Embodiments of the invention provide encapsulated sputtering targets and methods for preparing such targets prior to a physical vapor deposition (PVD) process. In one embodiment, an encapsulated target for PVD is provided which includes a target layer containing lanthanum disposed on a backing plate and an encapsulation layer containing titanium disposed on or over the target layer. In one example, the target layer contains metallic lanthanum or lanthanum oxide and the encapsulation layer contains titanium. The encapsulation layer may have a thickness within a range from about 1,000 Å to about 2,000 Å. In another embodiment, a method for preparing an encapsulated target prior to a PVD process is provided which includes positioning an encapsulated target within a PVD chamber and exposing the encapsulation layer to a plasma while removing the encapsulation layer and revealing an upper surface of the target layer.
Public/Granted literature
- US20100108500A1 ENCAPSULATED SPUTTERING TARGET Public/Granted day:2010-05-06
Information query
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