Invention Grant
US08133778B2 Layout method of semiconductor device with junction diode for preventing damage due to plasma charge
有权
具有结二极管的半导体器件的布局方法,用于防止等离子体电荷引起的损坏
- Patent Title: Layout method of semiconductor device with junction diode for preventing damage due to plasma charge
- Patent Title (中): 具有结二极管的半导体器件的布局方法,用于防止等离子体电荷引起的损坏
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Application No.: US12047071Application Date: 2008-03-12
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Publication No.: US08133778B2Publication Date: 2012-03-13
- Inventor: Soo-Young Kim , Jong-Hak Won
- Applicant: Soo-Young Kim , Jong-Hak Won
- Applicant Address: KR Maetan-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Maetan-dong, Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR10-2007-0030043 20070327
- Main IPC: H01L21/8234
- IPC: H01L21/8234

Abstract:
Provided is a layout method of junction diodes for preventing damage caused by plasma charge. The layout method includes operations of forming an active layer so as to form a plurality of active regions in a unit layout pattern; forming a gate layer so as to form a plurality of gate regions on the active regions; forming a first conductive type doping region in at least one of the plurality of active regions within a well layer where a second conductive type well region is formed so as to form a first conductive type active region; forming a second conductive type doping region in at least one of the plurality of active regions outside of the second conductive type well region so as to form a second conductive type active region; and forming a second conductive type doping region connected with the gate regions so as to form a junction diode in at least one active region between the first and second conductive type active regions.
Public/Granted literature
- US20090061579A1 LAYOUT METHOD OF SEMICONDUCTOR DEVICE WITH JUNCTION DIODE FOR PREVENTING DAMAGE DUE TO PLASMA CHARGE Public/Granted day:2009-03-05
Information query
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