Invention Grant
US08134223B2 III-V compound crystal and semiconductor electronic circuit element
有权
III-V复合晶体和半导体电子电路元件
- Patent Title: III-V compound crystal and semiconductor electronic circuit element
- Patent Title (中): III-V复合晶体和半导体电子电路元件
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Application No.: US12617733Application Date: 2009-11-13
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Publication No.: US08134223B2Publication Date: 2012-03-13
- Inventor: Seiji Nakahata , Koji Uematsu , Ryu Hirota
- Applicant: Seiji Nakahata , Koji Uematsu , Ryu Hirota
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agent James W. Judge
- Priority: JP2003-129829 20030508
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Favorable-quality III-V crystals are easily obtained at low cost without causing cracks, even when using a variety of substrates, and can be used to manufacture semiconductor devices with good quality and at high yields. The III-V crystals are characterized by the following properties: the carrier concentration, resistivity, and dislocation density of the III-V compound crystal are uniform to within ±30% variation along the surface; the III-V compound crystal is misoriented from the c-plane such that the crystal surface does not include any region where its off-axis angle with the c-plane is 0°; and the full width at half-maximum in XRD at the crystal center of the III-V compound is not greater than 150 arcsec.
Public/Granted literature
- US20100090313A1 III-V Compound Crystal and Semiconductor Electronic Circuit Element Public/Granted day:2010-04-15
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