Invention Grant
US08134276B2 Methods and systems for positioning micro elements 有权
用于定位微元件的方法和系统

Methods and systems for positioning micro elements
Abstract:
A micro device may comprise a substrate, a first micro structure coupled to the substrate, a second micro structure coupled to the substrate, and port configured to receive an input. The first micro structure is configured to move into engagement with the second micro structure in response to the input.
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